Study on the effect of etching process of NMOS structure using Silvaco TCAD tools: article
The effect due to the etching process of NMOS structure using Silvaco TCAD tools software was investigated using different etching methods by varying the etch rate and divergence rate. The etching methods are isotropic wet etching method and isotropic RIE etching method where the length of polysilic...
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| Main Authors: | , |
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| Format: | Article |
| Language: | en |
| Published: |
2008
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/125880/2/125880.pdf https://ir.uitm.edu.my/id/eprint/125880/ |
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