The effect of oxide thickness on C-V characteristics for NMOS: article

This paper is study on the effect of oxide thickness (t₀ᵪ) on C-V characteristics for NMOS. The project being done by using SILVACO TCAD software of using ATHENA and ATLAS simulator in order to fabricate the NMOS, extract oxide thickness and see the effect to C-V characteristics. Here, t₀ᵪ of 10.13n...

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Bibliographic Details
Main Author: Osman, Siti Shahada
Format: Article
Language:en
Published: 2009
Subjects:
Online Access:https://ir.uitm.edu.my/id/eprint/125219/1/125219.pdf
https://ir.uitm.edu.my/id/eprint/125219/
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