Characterization of trench Schottky diode with trench bottom oxide (TBO) process: article / Nurul Izzati Mohammad Noh, Mohd Rofei Mat Hussin and Maizatul Zolkapli
A new Schottky diode structure namely as TBO Trench Schottky diode is proposed. Introduction of TBO process to the trench Schottky diode has shown better device characteristics. In this study, the trench bottom oxide (TBO) process was developed in order to increased reverse blocking voltage of Schot...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | en |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/115604/1/115604.pdf https://ir.uitm.edu.my/id/eprint/115604/ |
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