Characterization of trench Schottky diode with trench bottom oxide (TBO) process / Nurul Izzati Mohammad Noh
A new Schottky diode structure namely as TBO Trench Schottky diode is proposed. Introduction of TBO process to the Trench Schottky diode has shown better device characteristics. In this study, the Trench Bottom Oxide (TBO) process was developed in order to increase reverse blocking voltage of Schott...
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| Format: | Thesis |
| Language: | en |
| Published: |
2012
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| Online Access: | https://ir.uitm.edu.my/id/eprint/115254/1/115254.pdf https://ir.uitm.edu.my/id/eprint/115254/ |
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