NMOS gate length scaling for 0.13µm using silvaco TCAD tools / Azlinawati Mohd Husain

This project is about down sizing the size of gate length of NMOS (n-channel MOSFET). The NMOS gate length is reduced from 0. I 8µm to 0. I 3µm. In order to reduce the size, the design process is based on the scaling factor rules. This process is done by using appropriate doping profile and oxide th...

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Bibliographic Details
Main Author: Mohd Husain, Azlinawati
Format: Thesis
Language:en
Published: 2006
Subjects:
Online Access:https://ir.uitm.edu.my/id/eprint/115211/1/115211.pdf
https://ir.uitm.edu.my/id/eprint/115211/
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