ANSYS simulation study of MEMS tuning fork gyroscope
Nowadays, MEMS based gyroscope had play importance role in today’s sensor device due to the sensitivity and its size. This paper presents a MEMS based Tuning Fork Gyroscope (TFG) design by using ANSYS software. The designing of the Tuning Fork Gyroscope is based on the architecture and the parameter...
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| Format: | Student Project |
| Language: | en |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/114342/1/114342.pdf https://ir.uitm.edu.my/id/eprint/114342/ |
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