Fabrication of dual- and single-layer piezoresistive microcantilever sensor

In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and s...

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Bibliographic Details

Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin
Format:	Article
Language:	en en
Published:	Asian Research Publishing Network (ARPN) 2015
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/50730/1/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor.pdf http://irep.iium.edu.my/50730/2/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor_SCOPUS.pdf http://irep.iium.edu.my/50730/ http://www.arpnjournals.com/jeas/research_papers/rp_2015/jeas_0815_2401.pdf
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