Fabrication of micro cavities by micro electrical discharged machining
The LIGA (Lithography, Electroplating and Molding) technique can fabricate high aspect ratio micro components with sub-micrometer accuracy and few tens of nano meter surface finish. This technique uses deep x-ray lithography with synchrotron radiation and as a result, the process becomes very comple...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Proceeding Paper |
| Language: | en |
| Published: |
2000
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27305/1/070_ICM_2000_BUET_285-291.pdf http://irep.iium.edu.my/27305/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|