Design and modelling of an impedance-based MEMS biosensor
This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to...
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| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | en |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/15123/1/06088352.pdf http://irep.iium.edu.my/15123/ http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6086117 |
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