Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | en |
| Published: |
Penerbit Universiti Kebangsaan Malaysia
2017
|
| Online Access: | http://journalarticle.ukm.my/10723/1/20%20R.%20Awang%20.pdf http://journalarticle.ukm.my/10723/ http://www.ukm.my/jsm/english_journals/vol46num3_2017/contentsVol46num3_2017.html |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|