DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
This research presents the design of CMOS-MEMS device with embedded microheater operating at relatively elevated temperatures (40°C to 150°C) for the purpose of relative humidity measurement. It is designed, simulated, fabricated and characterized to resolve the problem of reversibility and stabi...
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| Format: | Thesis |
| Language: | English |
| Published: |
2016
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| Online Access: | http://utpedia.utp.edu.my/id/eprint/21542/1/2015%20-ELECTRICAL%20%26%20ELECTRONIC%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20CMOS-MEMS%20MASS-SENSITIVE%20RELATIVE%20HUMIDITY%20SENSOR%20-%20ABDELAZIZ%20YOUSIF%20AHMED%20ALMAHI.pdf http://utpedia.utp.edu.my/id/eprint/21542/ |
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