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Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing

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Format: Citation Index Journal
Published: 2012
Online Access:http://eprints.utp.edu.my/9794/
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id my.utp.eprints.9794
record_format eprints
spelling my.utp.eprints.97942013-04-02T05:24:52Z Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing 2012 Citation Index Journal NonPeerReviewed UNSPECIFIED (2012) Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing. [Citation Index Journal] http://eprints.utp.edu.my/9794/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
format Citation Index Journal
title Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing
spellingShingle Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing
title_short Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing
title_full Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing
title_fullStr Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing
title_full_unstemmed Post-CMOS Processing and DC Characterization of a Resonant Microcantilever for Gas Sensing
title_sort post-cmos processing and dc characterization of a resonant microcantilever for gas sensing
publishDate 2012
url http://eprints.utp.edu.my/9794/
_version_ 1738655791042265088
score 13.211869

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