Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing
Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integratio...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
IEEE Xplore
2011
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/7174/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088353%26tag%3D1 http://ieeexplore.ieee.org http://eprints.utp.edu.my/7174/ |
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