A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing
This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is ro...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/6970/1/ICMENS_Camera_ready.pdf http://eprints.utp.edu.my/6970/ |
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