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A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. T...

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Main Authors: Md Khir, Mohd Haris, Qu, Hongwei
Format: Conference or Workshop Item
Published: 2010
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf
http://eprints.utp.edu.my/3451/
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spelling my.utp.eprints.34512017-01-19T08:24:28Z A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass Md Khir, Mohd Haris Qu, Hongwei TK Electrical engineering. Electronics Nuclear engineering This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. The device fabrication process consists of a standard CMOS process for sensor configuration and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. Bulk single-crystal silicon (SCS)substrate was included in the proof mass to increase sensor sensitivity. With a low operating power of 1.5�mW, the sensitivity was measured as 0.077 mV/g prior to amplification. The sensor was characterized on a magnetic shaker based dynamic test system with a high-end commercial calibrating accelerometer as reference. 2010-01-20 Conference or Workshop Item PeerReviewed application/pdf http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf Md Khir, Mohd Haris and Qu, Hongwei (2010) A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass. In: Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, January 20-23, Xiamen, China. http://eprints.utp.edu.my/3451/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Md Khir, Mohd Haris
Qu, Hongwei
A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
description This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. The device fabrication process consists of a standard CMOS process for sensor configuration and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. Bulk single-crystal silicon (SCS)substrate was included in the proof mass to increase sensor sensitivity. With a low operating power of 1.5�mW, the sensitivity was measured as 0.077 mV/g prior to amplification. The sensor was characterized on a magnetic shaker based dynamic test system with a high-end commercial calibrating accelerometer as reference.
format Conference or Workshop Item
author Md Khir, Mohd Haris
Qu, Hongwei
author_facet Md Khir, Mohd Haris
Qu, Hongwei
author_sort Md Khir, Mohd Haris
title A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
title_short A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
title_full A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
title_fullStr A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
title_full_unstemmed A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
title_sort cmos-mems piezoresistive accelerometer with large proof mass
publishDate 2010
url http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf
http://eprints.utp.edu.my/3451/
_version_ 1738655267924475904
score 13.211869

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