封面图片

Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes

Graphene-based ultra-thin films have good potential to be used as electrodes in many microelectronic, optoelectronic, energy storage, and sensing applications. Low sheet resistance (RS) of graphene-based thin-film electrodes (TFEs) is one of the key requirements for realizing efficient functional de...

全面介绍

Saved in:
书目详细资料
Main Authors: Kumar, P., Saheed, M.S.M., Ling, H.C., Thulasiraman, S.A., Gupta, M., Norhakim, N., Hawari, H.F., Burhanudin, Z.A.
格式: Article
出版: Elsevier B.V. 2022
在线阅读:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85133923825&doi=10.1016%2fj.surfin.2022.102161&partnerID=40&md5=756a2abb63ec9b2113c8dfe8adf7f017
http://eprints.utp.edu.my/33556/
标签: 添加标签
没有标签, 成为第一个标记此记录!
id my.utp.eprints.33556
record_format eprints
spelling my.utp.eprints.335562022-09-07T07:56:44Z Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes Kumar, P. Saheed, M.S.M. Ling, H.C. Thulasiraman, S.A. Gupta, M. Norhakim, N. Hawari, H.F. Burhanudin, Z.A. Graphene-based ultra-thin films have good potential to be used as electrodes in many microelectronic, optoelectronic, energy storage, and sensing applications. Low sheet resistance (RS) of graphene-based thin-film electrodes (TFEs) is one of the key requirements for realizing efficient functional devices. RS of graphene is unfortunately affected by some surface treatment processes such as annealing and patterning. In this work, we have investigated comprehensively the effect of aforementioned processes on RS of chemical vapor deposition-grown atomically-thin pristine graphene and its hybrid TFEs. Thermal treatment processes such as rapid thermal annealing and vacuum annealing are examined in order to enhance the interface adhesion of graphene-based TFEs. Whereas, patterning modes such as optical lithography (OL) and laser ablation are studied to improve the patterning accuracy. Variations in RS of TFEs are analyzed before and after the processes. We find that RS of TFEs is improved by 25-30 along with better interface adhesion after thermal treatments, attributing to the improvement in physical/chemical bonding and elimination of surface residues. In patterning part, CO2 laser negligibly affects the RS of TFEs whereas a 2.5-fold rise in RS is found after OL patterning. We believe that these results could be useful in producing reliable graphene-based devices. © 2022 Elsevier B.V. 2022 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85133923825&doi=10.1016%2fj.surfin.2022.102161&partnerID=40&md5=756a2abb63ec9b2113c8dfe8adf7f017 Kumar, P. and Saheed, M.S.M. and Ling, H.C. and Thulasiraman, S.A. and Gupta, M. and Norhakim, N. and Hawari, H.F. and Burhanudin, Z.A. (2022) Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes. Surfaces and Interfaces, 32 . http://eprints.utp.edu.my/33556/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description Graphene-based ultra-thin films have good potential to be used as electrodes in many microelectronic, optoelectronic, energy storage, and sensing applications. Low sheet resistance (RS) of graphene-based thin-film electrodes (TFEs) is one of the key requirements for realizing efficient functional devices. RS of graphene is unfortunately affected by some surface treatment processes such as annealing and patterning. In this work, we have investigated comprehensively the effect of aforementioned processes on RS of chemical vapor deposition-grown atomically-thin pristine graphene and its hybrid TFEs. Thermal treatment processes such as rapid thermal annealing and vacuum annealing are examined in order to enhance the interface adhesion of graphene-based TFEs. Whereas, patterning modes such as optical lithography (OL) and laser ablation are studied to improve the patterning accuracy. Variations in RS of TFEs are analyzed before and after the processes. We find that RS of TFEs is improved by 25-30 along with better interface adhesion after thermal treatments, attributing to the improvement in physical/chemical bonding and elimination of surface residues. In patterning part, CO2 laser negligibly affects the RS of TFEs whereas a 2.5-fold rise in RS is found after OL patterning. We believe that these results could be useful in producing reliable graphene-based devices. © 2022
format Article
author Kumar, P.
Saheed, M.S.M.
Ling, H.C.
Thulasiraman, S.A.
Gupta, M.
Norhakim, N.
Hawari, H.F.
Burhanudin, Z.A.
spellingShingle Kumar, P.
Saheed, M.S.M.
Ling, H.C.
Thulasiraman, S.A.
Gupta, M.
Norhakim, N.
Hawari, H.F.
Burhanudin, Z.A.
Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
author_facet Kumar, P.
Saheed, M.S.M.
Ling, H.C.
Thulasiraman, S.A.
Gupta, M.
Norhakim, N.
Hawari, H.F.
Burhanudin, Z.A.
author_sort Kumar, P.
title Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
title_short Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
title_full Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
title_fullStr Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
title_full_unstemmed Surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
title_sort surface-treatment process related sheet resistance variations in graphene-based thin-film electrodes
publisher Elsevier B.V.
publishDate 2022
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85133923825&doi=10.1016%2fj.surfin.2022.102161&partnerID=40&md5=756a2abb63ec9b2113c8dfe8adf7f017
http://eprints.utp.edu.my/33556/
_version_ 1744356184841781248
score 13.251813

相似书籍