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Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications

Capnometers measure the concentration of CO2 in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their...

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Main Authors: Mirza, A., Hamid, N.H., Khir, M.H.M., Dennis, J.O., Ashraf, K., Jan, M.T., Shoaib, M.
Format: Conference or Workshop Item
Published: 2013
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893577447&doi=10.1109%2fRSM.2013.6706475&partnerID=40&md5=932b8d4bb00e0312ac6e9d7442f73acc
http://eprints.utp.edu.my/32530/
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spelling my.utp.eprints.325302022-03-29T14:05:33Z Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K. Jan, M.T. Shoaib, M. Capnometers measure the concentration of CO2 in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their adaption. To overcome these issues, a CMOS MEMS micro-cantilever has been proposed for capnometric applications. Analytical modeling and simulation of the microcantilever sensor is carried out to determine its resonance frequency and sensitivity. According to the developed analytical model and simulation results, the sensor has 1 difference in the resonance frequency. The sensitivity of the sensor is determined analytically at different thicknesses of the polymer coating layer. The sensitivity of the sensor is 3.18 Hz/100ppm at 5 μm polymer layer thickness. © 2013 IEEE. 2013 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893577447&doi=10.1109%2fRSM.2013.6706475&partnerID=40&md5=932b8d4bb00e0312ac6e9d7442f73acc Mirza, A. and Hamid, N.H. and Khir, M.H.M. and Dennis, J.O. and Ashraf, K. and Jan, M.T. and Shoaib, M. (2013) Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications. In: UNSPECIFIED. http://eprints.utp.edu.my/32530/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description Capnometers measure the concentration of CO2 in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their adaption. To overcome these issues, a CMOS MEMS micro-cantilever has been proposed for capnometric applications. Analytical modeling and simulation of the microcantilever sensor is carried out to determine its resonance frequency and sensitivity. According to the developed analytical model and simulation results, the sensor has 1 difference in the resonance frequency. The sensitivity of the sensor is determined analytically at different thicknesses of the polymer coating layer. The sensitivity of the sensor is 3.18 Hz/100ppm at 5 μm polymer layer thickness. © 2013 IEEE.
format Conference or Workshop Item
author Mirza, A.
Hamid, N.H.
Khir, M.H.M.
Dennis, J.O.
Ashraf, K.
Jan, M.T.
Shoaib, M.
spellingShingle Mirza, A.
Hamid, N.H.
Khir, M.H.M.
Dennis, J.O.
Ashraf, K.
Jan, M.T.
Shoaib, M.
Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
author_facet Mirza, A.
Hamid, N.H.
Khir, M.H.M.
Dennis, J.O.
Ashraf, K.
Jan, M.T.
Shoaib, M.
author_sort Mirza, A.
title Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
title_short Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
title_full Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
title_fullStr Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
title_full_unstemmed Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
title_sort analytical modeling and simulation of a cmos-mems cantilever based co2 sensor for medical applications
publishDate 2013
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893577447&doi=10.1109%2fRSM.2013.6706475&partnerID=40&md5=932b8d4bb00e0312ac6e9d7442f73acc
http://eprints.utp.edu.my/32530/
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score 13.211869

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