Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors
Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatston...
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IEEE Computer Society
2014
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my.utp.eprints.320992022-03-29T04:34:40Z Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors Ahmad, F. Dennis, J.O. Khir, M.H.B.M. Bin Hamid, N.H. Yar, A. Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatstone bridge configuration, modeling is extended up to n branches for wide range of applications in MEMS. The comparative analysis of fully and half differential setups even with one variable resistor with balanced form of the two branch bridge is modeled as well as simulated using Multisim8. The sensitivity of the bridge in fully, half and with one variable resistor configuration is found to be 2 μV/mΩ, 1 μV/mΩ and 0.49 μV/mΩ respectively. It is found that fully differential set up is the most sensitive one. This output is amplifiable by using 1000 gain amplifier. © 2014 IEEE. IEEE Computer Society 2014 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906351322&doi=10.1109%2fICIAS.2014.6869496&partnerID=40&md5=6b23613466ecde564ce882d7e0e27d84 Ahmad, F. and Dennis, J.O. and Khir, M.H.B.M. and Bin Hamid, N.H. and Yar, A. (2014) Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors. In: UNSPECIFIED. http://eprints.utp.edu.my/32099/ |
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Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatstone bridge configuration, modeling is extended up to n branches for wide range of applications in MEMS. The comparative analysis of fully and half differential setups even with one variable resistor with balanced form of the two branch bridge is modeled as well as simulated using Multisim8. The sensitivity of the bridge in fully, half and with one variable resistor configuration is found to be 2 μV/mΩ, 1 μV/mΩ and 0.49 μV/mΩ respectively. It is found that fully differential set up is the most sensitive one. This output is amplifiable by using 1000 gain amplifier. © 2014 IEEE. |
| format |
Conference or Workshop Item |
| author |
Ahmad, F. Dennis, J.O. Khir, M.H.B.M. Bin Hamid, N.H. Yar, A. |
| spellingShingle |
Ahmad, F. Dennis, J.O. Khir, M.H.B.M. Bin Hamid, N.H. Yar, A. Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors |
| author_facet |
Ahmad, F. Dennis, J.O. Khir, M.H.B.M. Bin Hamid, N.H. Yar, A. |
| author_sort |
Ahmad, F. |
| title |
Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors |
| title_short |
Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors |
| title_full |
Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors |
| title_fullStr |
Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors |
| title_full_unstemmed |
Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors |
| title_sort |
modeling and simulation of two modes of vibration in mems devices based on embedded piezoresistors |
| publisher |
IEEE Computer Society |
| publishDate |
2014 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906351322&doi=10.1109%2fICIAS.2014.6869496&partnerID=40&md5=6b23613466ecde564ce882d7e0e27d84 http://eprints.utp.edu.my/32099/ |
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1738657340010266624 |
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13.211869 |