Fabrication and characterization of a CMOS-MEMS humidity sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sen...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
MDPI AG
2015
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84940185622&doi=10.3390%2fs150716674&partnerID=40&md5=280463bfea665cce4fcbe8e02aacde92 http://eprints.utp.edu.my/31431/ |
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