A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Published: |
Springer
2021
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925 http://eprints.utp.edu.my/30423/ |
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