Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs
The analytical modeling, design, and simulation of micromachined MEMS resonator for ammonia gas detection is presented in this paper. The MEMS resonator is designed to be vibrated electrostatically using interdigitated comb fingers. The demonstrated device is designed to be capable to carry micro-ri...
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Institute of Electrical and Electronics Engineers Inc.
2021
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my.utp.eprints.291822022-03-25T01:11:19Z Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs Ba Hashwan, S.S. Md Khir, M.H. Al-Douri, Y. Yousif, A. Ramza, H. Arjo, S. The analytical modeling, design, and simulation of micromachined MEMS resonator for ammonia gas detection is presented in this paper. The MEMS resonator is designed to be vibrated electrostatically using interdigitated comb fingers. The demonstrated device is designed to be capable to carry micro-ring resonator and vibrated in-plane laterally to enhance the sensitivity of the gas detection. This MEMS resonator working principle is based on the changes in the output signal wavelength due to the change in the effective refractive index introduced by the ammonia gas. The resonant frequency of the actuator and the pull-in voltage have been calculated theoretically and found to be 11.15 kHz and 79.7 V respectively. The design and simulation of the micromachined micro-resonator has been carried out using CoventorWare software. Furthermore, the mathematically modeled results were verified using the finite element analysis software and the result shows a good agreement within 1.06 error between the modeled and simulated frequencies where the modeled and the simulated frequencies are found to be 11.15 kHz and 11.27 kHz respectively. © 2021 IEEE. Institute of Electrical and Electronics Engineers Inc. 2021 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85124168317&doi=10.1109%2fICIAS49414.2021.9642706&partnerID=40&md5=999c4b0b94452e0b7795b0842ad485b0 Ba Hashwan, S.S. and Md Khir, M.H. and Al-Douri, Y. and Yousif, A. and Ramza, H. and Arjo, S. (2021) Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs. In: UNSPECIFIED. http://eprints.utp.edu.my/29182/ |
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The analytical modeling, design, and simulation of micromachined MEMS resonator for ammonia gas detection is presented in this paper. The MEMS resonator is designed to be vibrated electrostatically using interdigitated comb fingers. The demonstrated device is designed to be capable to carry micro-ring resonator and vibrated in-plane laterally to enhance the sensitivity of the gas detection. This MEMS resonator working principle is based on the changes in the output signal wavelength due to the change in the effective refractive index introduced by the ammonia gas. The resonant frequency of the actuator and the pull-in voltage have been calculated theoretically and found to be 11.15 kHz and 79.7 V respectively. The design and simulation of the micromachined micro-resonator has been carried out using CoventorWare software. Furthermore, the mathematically modeled results were verified using the finite element analysis software and the result shows a good agreement within 1.06 error between the modeled and simulated frequencies where the modeled and the simulated frequencies are found to be 11.15 kHz and 11.27 kHz respectively. © 2021 IEEE. |
| format |
Conference or Workshop Item |
| author |
Ba Hashwan, S.S. Md Khir, M.H. Al-Douri, Y. Yousif, A. Ramza, H. Arjo, S. |
| spellingShingle |
Ba Hashwan, S.S. Md Khir, M.H. Al-Douri, Y. Yousif, A. Ramza, H. Arjo, S. Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs |
| author_facet |
Ba Hashwan, S.S. Md Khir, M.H. Al-Douri, Y. Yousif, A. Ramza, H. Arjo, S. |
| author_sort |
Ba Hashwan, S.S. |
| title |
Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs |
| title_short |
Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs |
| title_full |
Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs |
| title_fullStr |
Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs |
| title_full_unstemmed |
Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs |
| title_sort |
design and simulation of mems electrostatic resonator for ammonia gas detection based on soimumps |
| publisher |
Institute of Electrical and Electronics Engineers Inc. |
| publishDate |
2021 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85124168317&doi=10.1109%2fICIAS49414.2021.9642706&partnerID=40&md5=999c4b0b94452e0b7795b0842ad485b0 http://eprints.utp.edu.my/29182/ |
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1738656929634320384 |
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13.211869 |