Design, modelling and testing of CMOS-MEMS switch
The Electro-Magnetic (EM) MEMS switches are playing an important role in our everyday life due to their high efficiency and system integrity. The design, modelling and testing of MEMS EM switch is presented in this research work. This chip-based MEMS switch is fabricated using 0.35 µm Complementar...
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| Main Authors: | , , , , , |
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| Format: | Article |
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Springer Science and Business Media Deutschland GmbH
2021
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85105282330&doi=10.1007%2fs00542-021-05221-4&partnerID=40&md5=0d74311cb885adfa75c962c024449ccb http://eprints.utp.edu.my/23847/ |
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| Summary: | The Electro-Magnetic (EM) MEMS switches are playing an important role in our everyday life due to their high efficiency and system integrity. The design, modelling and testing of MEMS EM switch is presented in this research work. This chip-based MEMS switch is fabricated using 0.35 µm Complementary Metal Oxide Semiconductor (CMOS) three metals-two poly technology, released i.e., post micromachining and packaged in Dual Inline package (DIP). The electromagnetic actuation-based CMOS-MEMS switch consists of two central coils joined to each other and two supporting beams. The two coils actuate in torsional mode by passing DC as well as AC current through coils. Switch is tested in static and dynamic modes. Actuation voltages of 68 V are measured in the static mode, while in dynamic mode, voltages are 68 mV. Finally, compared theoretical and experimental measurements. © 2021, The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature. |
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