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Finite element analysis of silicon nanowire array based SAW gas sensor

This work presents the design and finite element analysis of a surface acoustic wave (SAW)-based sensor for the detection of volatile organic compound (VOC) gases. The effect of silicon nanowire array (SiNWA) on a 128º YX-lithium niobate (LiNbO3) substrate for sensing the VOC gases was simulated usi...

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Bibliographic Details
Main Authors: Ahmad Asri, Muhammad Izzudin, Hasan, Md. Nazibul, Ahmad Fua’ad, Mariatul Rawdhah, Abd. Hamid, Fatimah Khairiah, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan
Format: Article
Language:English
Published: Penerbit UTM Press 2021
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/97820/1/YusriMdYunos2021_FiniteElementAnalysisofSiliconNanowire.pdf
http://eprints.utm.my/id/eprint/97820/
https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/305
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http://eprints.utm.my/id/eprint/97820/1/YusriMdYunos2021_FiniteElementAnalysisofSiliconNanowire.pdf
http://eprints.utm.my/id/eprint/97820/
https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/305

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