Electron microscopy determination of crystallographic polarity of aluminum nitride thin films
Aluminum nitride (AlN) crystallizes usually in the wurtzite structure (P6 3 mc) and it has a crystallographic polarity. In this work, the polarity in AlN was characterized by using several methods of transmission electron microscopy (TEM) in order to examine their applicability. AlN was deposited by...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Elsevier Ltd.
2019
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/87626/ http://dx.doi.org/10.1016/j.micron.2018.09.014 |
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