The effect of RF-sputtering temperature of yittria-stabilized zirconia nanostructure electrolyte for SOFC application
Yttria-stabilized zirconia (YSZ) thin films were fabricated successfully using reactive RF magnetron sputtering. The substrate had been used are sapphire glass. A pure ceramic of Zr-Y is synthesized and processed into a planar magnetron target which is reactively sputtered with an Argon-Oxygen gas m...
Saved in:
| Main Author: | |
|---|---|
| Format: | Article |
| Published: |
Malaysian Journal of Catalysis
2018
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/82235/ https://www.semanticscholar.org |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|