A stainless-steel-based implantable pressure sensor chip and its integration by microwelding
A stainless-steel (SS) chip of capacitive pressure sensor and its integration method are developed with a focus on smart implant applications. The sensors are entirely microfabricated with biocompatible materials, through thermal bonding of gold-polyimide diaphragm film to the chip dies made of medi...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Elsevier B.V.
2017
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/75764/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014095159&doi=10.1016%2fj.sna.2017.01.017&partnerID=40&md5=d07755ba339c7f5188110a7e68d54e2c |
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