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Design and fabrication of a novel XYθz monolithic micro-positioning stage driven by NiTi shape-memory-alloy actuators

This paper reports a new shape-memory-alloy (SMA) micro-positioning stage. The device has been monolithically micro-machined with a single fabrication step. The design comprises a moving stage that is manipulated by six SMA planar springs actuators to generate movements with three degrees of freedom...

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書誌詳細
主要な著者:	AbuZaiter, A., Hikmat, O. F., Nafea, M., Ali, M. S. M.
フォーマット:	論文
出版事項:	Institute of Physics Publishing 2016
主題:	TK Electrical engineering. Electronics Nuclear engineering
オンライン･アクセス:	http://eprints.utm.my/id/eprint/72079/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989930765&doi=10.1088%2f0964-1726%2f25%2f10%2f105004&partnerID=40&md5=7a8b84e4becc2493415e602884e168e7
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