Design and fabrication of a novel XYθz monolithic micro-positioning stage driven by NiTi shape-memory-alloy actuators
This paper reports a new shape-memory-alloy (SMA) micro-positioning stage. The device has been monolithically micro-machined with a single fabrication step. The design comprises a moving stage that is manipulated by six SMA planar springs actuators to generate movements with three degrees of freedom...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Institute of Physics Publishing
2016
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/72079/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989930765&doi=10.1088%2f0964-1726%2f25%2f10%2f105004&partnerID=40&md5=7a8b84e4becc2493415e602884e168e7 |
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