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Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking

This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an induct...

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Main Authors: Mohamed Ali, Mohamed Sultan, Abuzaiter, Alaa, Schlosser, Colin, Bycraft, Brad, Takahata, Kenichi
Format: Article
Published: MDPI AG 2014
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/63246/
http://dx.doi.org/10.3390/s140712399
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spelling my.utm.632462017-06-19T03:51:26Z http://eprints.utm.my/id/eprint/63246/ Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking Mohamed Ali, Mohamed Sultan Abuzaiter, Alaa Schlosser, Colin Bycraft, Brad Takahata, Kenichi TK Electrical engineering. Electronics Nuclear engineering This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit's resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/μm or more for a full out-of-plane travel range of 466 μm and an average actuation velocity of up to 155 μm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device. MDPI AG 2014 Article PeerReviewed Mohamed Ali, Mohamed Sultan and Abuzaiter, Alaa and Schlosser, Colin and Bycraft, Brad and Takahata, Kenichi (2014) Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking. Sensors, 14 (7). pp. 12399-12409. ISSN 1424-8220 http://dx.doi.org/10.3390/s140712399 DOI :10.3390/s140712399
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Mohamed Ali, Mohamed Sultan
Abuzaiter, Alaa
Schlosser, Colin
Bycraft, Brad
Takahata, Kenichi
Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
description This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit's resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/μm or more for a full out-of-plane travel range of 466 μm and an average actuation velocity of up to 155 μm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device.
format Article
author Mohamed Ali, Mohamed Sultan
Abuzaiter, Alaa
Schlosser, Colin
Bycraft, Brad
Takahata, Kenichi
author_facet Mohamed Ali, Mohamed Sultan
Abuzaiter, Alaa
Schlosser, Colin
Bycraft, Brad
Takahata, Kenichi
author_sort Mohamed Ali, Mohamed Sultan
title Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
title_short Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
title_full Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
title_fullStr Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
title_full_unstemmed Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
title_sort wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
publisher MDPI AG
publishDate 2014
url http://eprints.utm.my/id/eprint/63246/
http://dx.doi.org/10.3390/s140712399
_version_ 1643655662648950784
score 13.211869

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