Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam
This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functi...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Trans Tech Publications
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/62585/ http://dx.doi.org/10.4028/www.scientific.net/AMR.845.340 |
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