Miniaturized planar sensor development
This paper describes the process of developing a miniature device with planar sensors utilizing electrical capacitance measurement. The project investigates the feasibility and characterization of a miniaturized planar sensor integrated on a polydimethylsiloxane (PDMS) chamber. A 16-planar-electrode...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/54110/1/RuzairiAbdulRahim2014_Miniaturizedplanarsensordevelopment.pdf http://eprints.utm.my/id/eprint/54110/ http://dx.doi.org/10.11113/jt.v69.3303 |
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