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Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD

A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic...

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Main Author: Hasanudin, Muhammad Akmal
Format: Thesis
Language:English
Published: 2015
Subjects:
QC Physics
Online Access:http://eprints.utm.my/id/eprint/54011/25/MuhammadAkmalHasanudinMFS2015.pdf
http://eprints.utm.my/id/eprint/54011/
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spelling my.utm.540112020-10-14T09:00:00Z http://eprints.utm.my/id/eprint/54011/ Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD Hasanudin, Muhammad Akmal QC Physics A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic imaging, Raman spectroscopy and X-ray diffraction technique. FESEM imaging had revealed two different carbon nanowalls (CNW), namely wavy-like and dense structure. A significant change in the film density and wall size were observed when H2 flow rate and substrate temperature were varied. It was found that a suitable intermixing of H2 and CH4 is necessary for synthesizing good quality CNW. A limited or excessive amount of H2 flow produced CNW having high defects density and poor surface coverage due to variation in the concentration of H radicals. In addition, a drastic change in film morphology was observed at growth temperature between 750 °C to 850 °C due to high rate of surface reactions. The growth of CNW was found to be more efficient at smaller electrode spacing due to better flux of hydrocarbon radicals towards the substrate surface. Typical characteristics of CNW were observed from strong D band, narrow bandwidth of G band and single broad peak of 2D band of Raman spectra indicating the presence of disordered nanocrystalline graphite structure with high degree of graphitization. The occurrence of strong peak at [002] plane with interplanar distance of 0.34 nm confirmed the growth of 2D highly graphitized CNW. It can be concluded that a capacitively coupled 150 MHz VHFPECVD is a promising alternative technique for CNW fabrication due to its capability to dissociate CH4 to CHx and H radicals more efficiently. 2015-03 Thesis NonPeerReviewed application/pdf en http://eprints.utm.my/id/eprint/54011/25/MuhammadAkmalHasanudinMFS2015.pdf Hasanudin, Muhammad Akmal (2015) Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD. Masters thesis, Universiti Teknologi Malaysia, Faculty of Science. http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:86566
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
language English
topic QC Physics
spellingShingle QC Physics
Hasanudin, Muhammad Akmal
Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
description A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic imaging, Raman spectroscopy and X-ray diffraction technique. FESEM imaging had revealed two different carbon nanowalls (CNW), namely wavy-like and dense structure. A significant change in the film density and wall size were observed when H2 flow rate and substrate temperature were varied. It was found that a suitable intermixing of H2 and CH4 is necessary for synthesizing good quality CNW. A limited or excessive amount of H2 flow produced CNW having high defects density and poor surface coverage due to variation in the concentration of H radicals. In addition, a drastic change in film morphology was observed at growth temperature between 750 °C to 850 °C due to high rate of surface reactions. The growth of CNW was found to be more efficient at smaller electrode spacing due to better flux of hydrocarbon radicals towards the substrate surface. Typical characteristics of CNW were observed from strong D band, narrow bandwidth of G band and single broad peak of 2D band of Raman spectra indicating the presence of disordered nanocrystalline graphite structure with high degree of graphitization. The occurrence of strong peak at [002] plane with interplanar distance of 0.34 nm confirmed the growth of 2D highly graphitized CNW. It can be concluded that a capacitively coupled 150 MHz VHFPECVD is a promising alternative technique for CNW fabrication due to its capability to dissociate CH4 to CHx and H radicals more efficiently.
format Thesis
author Hasanudin, Muhammad Akmal
author_facet Hasanudin, Muhammad Akmal
author_sort Hasanudin, Muhammad Akmal
title Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
title_short Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
title_full Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
title_fullStr Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
title_full_unstemmed Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
title_sort investigation on morphology and structural properties of 2d carbon nanostructure grown via 150 mhz pecvd
publishDate 2015
url http://eprints.utm.my/id/eprint/54011/25/MuhammadAkmalHasanudinMFS2015.pdf
http://eprints.utm.my/id/eprint/54011/
http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:86566
_version_ 1681489458329812992
score 13.211869

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