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Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators

This paper reports a study on wireless radiofrequency (RF) power transfer to and heat generation in micropatterned coils for wireless control of thermally-driven microdevices. Inductor-capacitor circuits with the planar spiral coils act as RF receivers as well as frequency-sensitive wireless heaters...

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Main Authors: Mohamed Ali, Mohamed Sultan, Yuan, Wang Ning, Takahata, Kenichi
Format: Article
Published: Springer-Verlag Berlin Heidelberg 2014
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/51837/
http://dx.doi.org/10.1007/s00542-013-1776-1
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spelling my.utm.518372018-10-22T02:54:59Z http://eprints.utm.my/id/eprint/51837/ Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators Mohamed Ali, Mohamed Sultan Yuan, Wang Ning Takahata, Kenichi TK Electrical engineering. Electronics Nuclear engineering This paper reports a study on wireless radiofrequency (RF) power transfer to and heat generation in micropatterned coils for wireless control of thermally-driven microdevices. Inductor-capacitor circuits with the planar spiral coils act as RF receivers as well as frequency-sensitive wireless heaters that selectively produce heat when resonated with external RF magnetic fields. Electrical and thermal characterizations are performed using two sets of microfabricated circuits with varying numbers of turns and fill ratios defined in the spiral coils. The measurements in electrical parameters of the circuits, coupling coefficient, power transfer efficiency, and heat generation have been evaluated and parameters show good consistency between them. These tests reveal maximum power transfer efficiency and steady-state temperature of ~35 and 99 C, respectively, for the coil with a fill ratio of 0.55. The reported results will serve as a basis for the design of the wireless heater, which provide a promising path to radio-control of thermoresponsive actuators such as shape-memory alloys and hydrogels Springer-Verlag Berlin Heidelberg 2014 Article PeerReviewed Mohamed Ali, Mohamed Sultan and Yuan, Wang Ning and Takahata, Kenichi (2014) Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators. Microsystem Technologies, 20 (2). pp. 235-241. ISSN 0946-7076 http://dx.doi.org/10.1007/s00542-013-1776-1
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Mohamed Ali, Mohamed Sultan
Yuan, Wang Ning
Takahata, Kenichi
Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
description This paper reports a study on wireless radiofrequency (RF) power transfer to and heat generation in micropatterned coils for wireless control of thermally-driven microdevices. Inductor-capacitor circuits with the planar spiral coils act as RF receivers as well as frequency-sensitive wireless heaters that selectively produce heat when resonated with external RF magnetic fields. Electrical and thermal characterizations are performed using two sets of microfabricated circuits with varying numbers of turns and fill ratios defined in the spiral coils. The measurements in electrical parameters of the circuits, coupling coefficient, power transfer efficiency, and heat generation have been evaluated and parameters show good consistency between them. These tests reveal maximum power transfer efficiency and steady-state temperature of ~35 and 99 C, respectively, for the coil with a fill ratio of 0.55. The reported results will serve as a basis for the design of the wireless heater, which provide a promising path to radio-control of thermoresponsive actuators such as shape-memory alloys and hydrogels
format Article
author Mohamed Ali, Mohamed Sultan
Yuan, Wang Ning
Takahata, Kenichi
author_facet Mohamed Ali, Mohamed Sultan
Yuan, Wang Ning
Takahata, Kenichi
author_sort Mohamed Ali, Mohamed Sultan
title Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
title_short Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
title_full Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
title_fullStr Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
title_full_unstemmed Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
title_sort analysis of micropatterned wireless resonant heaters for wireless-control of mems thermal actuators
publisher Springer-Verlag Berlin Heidelberg
publishDate 2014
url http://eprints.utm.my/id/eprint/51837/
http://dx.doi.org/10.1007/s00542-013-1776-1
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score 13.211869

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