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Fabrication of nanowire using ash trimming technique

The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw / Δh, the study also revealed that the proposed fabrication method could potentially be used to fabricate specific nanometer-scale structure and space structure with uni...

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Main Authors:	Adam, T., Hashim, U., Leow, P. L., D., Q. H.
Format:	Conference or Workshop Item
Published:	2013
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/id/eprint/51062/ http://dx.doi.org/10.4028/www.scientific.net/AMR.626.1042
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id	my.utm.51062
record_format	eprints
spelling	my.utm.510622017-09-17T06:27:00Z http://eprints.utm.my/id/eprint/51062/ Fabrication of nanowire using ash trimming technique Adam, T. Hashim, U. Leow, P. L. D., Q. H. TK Electrical engineering. Electronics Nuclear engineering The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw / Δh, the study also revealed that the proposed fabrication method could potentially be used to fabricate specific nanometer-scale structure and space structure with uniform surface morphology without any damage to the photoresist. Yet with reduced ashing time and without popping of the photoresist ashing process when the a fabricated is being carried out and subsequently trimmed to nanosize by plasma oxidation, the study also revealed the dramatic increase in aspect ratio as the structure reduces in lateral dimension. 2013 Conference or Workshop Item PeerReviewed Adam, T. and Hashim, U. and Leow, P. L. and D., Q. H. (2013) Fabrication of nanowire using ash trimming technique. In: Advanced Materials Research. http://dx.doi.org/10.4028/www.scientific.net/AMR.626.1042
institution	Universiti Teknologi Malaysia
building	UTM Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Teknologi Malaysia
content_source	UTM Institutional Repository
url_provider	http://eprints.utm.my/
topic	TK Electrical engineering. Electronics Nuclear engineering
spellingShingle	TK Electrical engineering. Electronics Nuclear engineering Adam, T. Hashim, U. Leow, P. L. D., Q. H. Fabrication of nanowire using ash trimming technique
description	The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw / Δh, the study also revealed that the proposed fabrication method could potentially be used to fabricate specific nanometer-scale structure and space structure with uniform surface morphology without any damage to the photoresist. Yet with reduced ashing time and without popping of the photoresist ashing process when the a fabricated is being carried out and subsequently trimmed to nanosize by plasma oxidation, the study also revealed the dramatic increase in aspect ratio as the structure reduces in lateral dimension.
format	Conference or Workshop Item
author	Adam, T. Hashim, U. Leow, P. L. D., Q. H.
author_facet	Adam, T. Hashim, U. Leow, P. L. D., Q. H.
author_sort	Adam, T.
title	Fabrication of nanowire using ash trimming technique
title_short	Fabrication of nanowire using ash trimming technique
title_full	Fabrication of nanowire using ash trimming technique
title_fullStr	Fabrication of nanowire using ash trimming technique
title_full_unstemmed	Fabrication of nanowire using ash trimming technique
title_sort	fabrication of nanowire using ash trimming technique
publishDate	2013
url	http://eprints.utm.my/id/eprint/51062/ http://dx.doi.org/10.4028/www.scientific.net/AMR.626.1042
_version_	1643652927637684224
score	13.211869

Fabrication of nanowire using ash trimming technique

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