Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The tim...
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| Format: | Thesis |
| Language: | English |
| Published: |
2014
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| Online Access: | http://eprints.utm.my/id/eprint/48924/25/NurulAinMohdMFS2014.pdf http://eprints.utm.my/id/eprint/48924/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:85264 |
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