Effects of gas pressure on the synthesis and photoluminescence properties of Si nanowires in VHF-PECVH method
Silicon nanowires (SiNWs) were grown on an Au-coated Si(111) substrate at various gas pressures by very high frequency plasma enhanced chemical vapor deposition via the vapor–liquid–solid mechanism. The synthesized SiNWs were characterized by field emission scanning electron microscopy, energy-dispe...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
2012
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/46891/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|