Synthesis and analysis of silicon nanowire below Si-Au eutectic temperatures using very high frequency plasma enhanced chemical vapor deposition
Silicon nanowires (SiNWs) were synthesized from pure silane precursor gas and Au nanoparticles catalyst at below Au-Si eutectic temperature. The SiNWs were grown onto Si (1 1 1) substrates using very high frequency plasma enhanced chemical vapor deposition via a vapor-solid-solid mechanism at temper...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Elsevier
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/29417/ http://dx.doi.org/10.1016/j.apsusc.2011.05.130 |
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