Low and high frequency characterization of metal finger capacitors for RFICs

This paper proposes a new method for verifying the design and characterization of radio frequency metal finger capacitors at low and high frequencies. Scalable models for metal finger capacitors for up to 20 GHz are produced using a simple and reliable modeling method. This work includes verificatio...

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Bibliographic Details
Main Authors: Subramaniam, Kalavathi, Kordesch, Albert Victor, Esa, Mazlina
Format: Conference or Workshop Item
Published: 2007
Subjects:
Online Access:http://eprints.utm.my/id/eprint/14616/
http://dx.doi.org/10.1109/ISSSE.2007.4294539
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Summary:This paper proposes a new method for verifying the design and characterization of radio frequency metal finger capacitors at low and high frequencies. Scalable models for metal finger capacitors for up to 20 GHz are produced using a simple and reliable modeling method. This work includes verification of the produced design and model using LC band pass filters. The metal finger capacitors and filters have been fabricated in Silterra's industry standard 180 nm 6 layer metal RF CMOS process.