Humidity effects on the electrical properties of hexagonal boron nitride thin films
Thin films of hexagonal boron nitride (h-BN) were grown by a plasma enhanced chemical vapour deposition (PECVD) technique. The quality of the films was assessed by infrared spectroscopy, microRaman spectroscopy as a function of annealing temperature and by X-ray photoelectron spectroscopy. The films...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Elsevier
2005
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/12442/ http://dx.doi.org/10.1016/j.tsf.2004.06.142 |
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