Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts
This study focused on the effect of laser annealing on Pt/Ag metal contacts deposited on Silicon, (Si) substrates. DC sputtering was used to deposit the metal thin films on the Si. The samples were treated by annealing using pulsed Nd:YAG laser. Then, the samples were characterized based on its morp...
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| Main Authors: | , |
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| Format: | Article |
| Published: |
Science Publishing Corporation
2018
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/5920/ |
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