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Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication

This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precis...

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Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/8972/1/ICOMM-2011.pdf
http://eprints.utem.edu.my/id/eprint/8972/
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spelling my.utem.eprints.89722015-05-28T04:00:33Z http://eprints.utem.edu.my/id/eprint/8972/ Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication Md Ghazaly, Mariam TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precision motion and sufficient force for a fine motion stage. For this purpose, a two-layer electrostatic actuator was developed and evaluated. Lubrication oils are used as lubricants in order to obtain low friction by maintaining the gaps between the stator and mover layers without precise balls for simplicity and easy maintenance. Each layer of the electrostatic actuator has one electrode, which consists of several beams. The motion characteristics of the electrostatic actuator without precise balls depend on the input signal to the actuator, which consequently influences the frictional effect. First, this paper examines the resultant effects of the driving signals on the motion characteristics. Next, based on the driving signal, the control system for the actuator is designed. The control system includes the PID compensator and the driving signal unit which generates the suitable signal for full working range motion. The actuator exhibits the positioning accuracy better than 15nm. 2011-03-07 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/8972/1/ICOMM-2011.pdf Md Ghazaly, Mariam (2011) Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication. In: The 6th International Conference on Micromanufacturing (ICOMM2011), 7 - 10 March 2011, Tokyo, Japan.
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Md Ghazaly, Mariam
Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
description This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precision motion and sufficient force for a fine motion stage. For this purpose, a two-layer electrostatic actuator was developed and evaluated. Lubrication oils are used as lubricants in order to obtain low friction by maintaining the gaps between the stator and mover layers without precise balls for simplicity and easy maintenance. Each layer of the electrostatic actuator has one electrode, which consists of several beams. The motion characteristics of the electrostatic actuator without precise balls depend on the input signal to the actuator, which consequently influences the frictional effect. First, this paper examines the resultant effects of the driving signals on the motion characteristics. Next, based on the driving signal, the control system for the actuator is designed. The control system includes the PID compensator and the driving signal unit which generates the suitable signal for full working range motion. The actuator exhibits the positioning accuracy better than 15nm.
format Conference or Workshop Item
author Md Ghazaly, Mariam
author_facet Md Ghazaly, Mariam
author_sort Md Ghazaly, Mariam
title Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
title_short Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
title_full Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
title_fullStr Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
title_full_unstemmed Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
title_sort evaluation of a multilayer electrostatic actuator for a fine motion stage without precise balls for lubrication
publishDate 2011
url http://eprints.utem.edu.my/id/eprint/8972/1/ICOMM-2011.pdf
http://eprints.utem.edu.my/id/eprint/8972/
_version_ 1665905380332404736
score 13.211869

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