Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
Elsevier
2012
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| Online Access: | http://eprints.utem.edu.my/id/eprint/6451/3/ICPT2012.pdf http://eprints.utem.edu.my/id/eprint/6451/ |
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