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Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique

Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it...

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Main Authors: Kok, Swee Leong, White, Neil, Nick, Harris
Format: Conference or Workshop Item
Language:English
Published: 2008
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf
http://eprints.utem.edu.my/id/eprint/4374/
http://www.mendeley.com/research/freestanding-pbzr-tio3-thickfilms-prepared-by-a-onestep-air-cofiring-technique/
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spelling my.utem.eprints.43742015-05-28T02:41:30Z http://eprints.utem.edu.my/id/eprint/4374/ Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique Kok, Swee Leong White, Neil Nick, Harris TK Electrical engineering. Electronics Nuclear engineering Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it was possible to fabricate a flat, but angled cantilever. In this work, sandwich structures consisting of PZT layers and Ag/Pd conductors, with in either interdigitated (IDT) or plated electrode configurations were fabricated in order to investigate the structural strength and the characteristics of free-standing structures. Screen printed carbon was used as a sacrificial layer. In the final step of the process, this was burnt out at a temperature of 850 C in an air environment. This resulted in a free-standing, sandwich structure of PZT-Ag/Pd. In order to reduce the problems of process complexity, a one-step firing process was used, whereby the sacrificial layer was co-fired together with PZT-Ag/Pd layers. The measurement results showed that the materials have a piezoelectric charge coefficient, d31 of -25 pC/N and coupling coefficient, k31 of 0.125. The cantilever structures were found to have a maximum Q-factor of around 200, and produced useful amounts of electrical power when driving resistive loads at low acceleration levels. 2008 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf Kok, Swee Leong and White, Neil and Nick, Harris (2008) Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique. In: Electroceramics XI, 1 - 3 September 2008, Manchester, UK.. http://www.mendeley.com/research/freestanding-pbzr-tio3-thickfilms-prepared-by-a-onestep-air-cofiring-technique/
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Kok, Swee Leong
White, Neil
Nick, Harris
Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
description Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it was possible to fabricate a flat, but angled cantilever. In this work, sandwich structures consisting of PZT layers and Ag/Pd conductors, with in either interdigitated (IDT) or plated electrode configurations were fabricated in order to investigate the structural strength and the characteristics of free-standing structures. Screen printed carbon was used as a sacrificial layer. In the final step of the process, this was burnt out at a temperature of 850 C in an air environment. This resulted in a free-standing, sandwich structure of PZT-Ag/Pd. In order to reduce the problems of process complexity, a one-step firing process was used, whereby the sacrificial layer was co-fired together with PZT-Ag/Pd layers. The measurement results showed that the materials have a piezoelectric charge coefficient, d31 of -25 pC/N and coupling coefficient, k31 of 0.125. The cantilever structures were found to have a maximum Q-factor of around 200, and produced useful amounts of electrical power when driving resistive loads at low acceleration levels.
format Conference or Workshop Item
author Kok, Swee Leong
White, Neil
Nick, Harris
author_facet Kok, Swee Leong
White, Neil
Nick, Harris
author_sort Kok, Swee Leong
title Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
title_short Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
title_full Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
title_fullStr Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
title_full_unstemmed Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
title_sort free-standing pb(zr, ti)o3 thick-films prepared by a one-step air co-firing technique
publishDate 2008
url http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf
http://eprints.utem.edu.my/id/eprint/4374/
http://www.mendeley.com/research/freestanding-pbzr-tio3-thickfilms-prepared-by-a-onestep-air-cofiring-technique/
_version_ 1665905281813446656
score 13.211869

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