Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching
A silicon substrate consisting of nanoporous silicon film could enhance the thermoelectric performance of bulk silicon due to its low thermal conductivity. Metal-assisted chemical etching (MACE) is a wet method for fabricating diverse nano/micro structures, which uses a noble metal as the catalyst f...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Institute of Physics Publishing
2020
|
| Online Access: | http://eprints.utem.edu.my/id/eprint/25092/2/2020_4%20THERMOELECTRICAL%20PROPERTIES%20OF%20SILICON%20SUBSTRATES%20WITH.PDF http://eprints.utem.edu.my/id/eprint/25092/ https://iopscience.iop.org/article/10.1088/1361-6528/ab8fe1 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|