The Evaluation of a Locking Function For a Vertical Stage Electrostatic Actuator

The present paper validates the effectiveness of the characteristic switching as a locking function for a vertical motion multilayer thin electrostatic actuator supported by only lubricating oil. In the electrostatic actuator, the friction forces often deteriorate the response and positioning accura...

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2014
Subjects:
Online Access:http://eprints.utem.edu.my/id/eprint/13537/1/paper_10033.pdf
http://eprints.utem.edu.my/id/eprint/13537/
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