Process Modeling, Optimization and Characterization of Silicon <100> Optical Waveguides by Anisotropic Wet Etching
We present a detailed fabrication process of silicon optical waveguide with a depth of 4μm via simulation and experiment. An anisotropic wet etching using Potassium Hydroxide (KOH) solutions was selected to study the influence of major fabrication parameters such as etch rate, oxidation time and...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications
2012
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/13076/1/icmens_ura.pdf http://eprints.utem.edu.my/id/eprint/13076/ |
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