Chemical Composition Analysis of TiAlBN Nanocomposite Coating Deposited via RF Magnetron Sputtering
TiAlBN nanocomposite coating have been successfully deposited on AISI 316 substrate via RF magnetron sputtering by varying nitrogen-to-total flow ratio (RN) of 5, 15, 20, 25%, as well as varying substrate temperature of 100, 200, 300, and 400 ºC; using single Ti-Al-BN hot-pressed target. Chemical...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/10973/1/KEM.594-595.551_Wai_loon.pdf http://eprints.utem.edu.my/id/eprint/10973/ |
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