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Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].

Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolith...

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Main Author: Siow, Yuen Tien
Format: Thesis
Language:English
Published: 2008
Subjects:
TR925-1050 Photomechanical processes
Online Access:http://eprints.usm.my/9613/1/CYCLE_TIME_ANALYSIS_FOR_PHOTOLITHOGRAPHY_TOOLS_IN.pdf
http://eprints.usm.my/9613/
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spelling my.usm.eprints.9613 http://eprints.usm.my/9613/ Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. Siow, Yuen Tien TR925-1050 Photomechanical processes Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithography 2008-11 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/9613/1/CYCLE_TIME_ANALYSIS_FOR_PHOTOLITHOGRAPHY_TOOLS_IN.pdf Siow, Yuen Tien (2008) Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. Masters thesis, Universiti Sains Malaysia.
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic TR925-1050 Photomechanical processes
spellingShingle TR925-1050 Photomechanical processes
Siow, Yuen Tien
Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
description Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithography
format Thesis
author Siow, Yuen Tien
author_facet Siow, Yuen Tien
author_sort Siow, Yuen Tien
title Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
title_short Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
title_full Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
title_fullStr Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
title_full_unstemmed Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
title_sort cycle time analysis for photolithography tools in semiconductor manufacturing industry with simulation model : a case study [tr940. s618 2008 f rb].
publishDate 2008
url http://eprints.usm.my/9613/1/CYCLE_TIME_ANALYSIS_FOR_PHOTOLITHOGRAPHY_TOOLS_IN.pdf
http://eprints.usm.my/9613/
_version_ 1643701321076834304
score 13.211869

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