Investigation Of Phosphorus Spin On Dopant On SOI Wafer
Silicon on insulator (SOI) wafer has made it possible for the integrated circuit sector to develop superior, high-performance of semiconductor device and doping techniques are essential in forming the PN junction for semiconductor device. There are two most common doping techniques which is chemic...
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| Format: | Monograph |
| Language: | English |
| Published: |
Universiti Sains Malaysia
2022
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| Online Access: | http://eprints.usm.my/56691/1/Investigation%20Of%20Phosphorus%20Spin%20On%20Dopant%20On%20SOI%20Wafer_Tang%20Yi%20Tian.pdf http://eprints.usm.my/56691/ |
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