Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates
The optical and electrical properties of indium tin oxide (ITO) thin films grown on soda-lime glass substrates using a radio frequency (RF) magnetron sputtering technique were studied as a function of the sputtering RF power. Fixed 100nm thickness of ITO films were deposited on the soda-lime glass s...
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| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48849/1/ICoSeMT%202019%20ABSTRACT%20BOOK%20119.pdf http://eprints.usm.my/48849/ |
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